@conference{aufsatz10867,
    affiliation = {Professur für Optoelektronische Bauelemente und Systeme},
    title = {Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding},
    journal = {Proceedings of SPIE},
    pages = {611402-1--611402-7},
    year = {2006},
    peerreview = {Nein},
    volume = {6114},
    doi = {www.spie.org},
    edition = {keiner},
    author = {Bakke, T. and Völker, B. and Rudloff, D. and Friedrichs, M. and Schenk, H. and Lakner, H.}
}