@conference{aufsatz10910,
    affiliation = {Professur für Optoelektronische Bauelemente und Systeme},
    title = {Microactuator with extended analog deflection at low drive voltage},
    journal = {Proceedings of SPIE},
    pages = {61140I-1--61140I-10},
    year = {2006},
    peerreview = {Nein},
    volume = {6114},
    doi = {www.spie.org/press},
    edition = {keiner},
    author = {Dürr, P. and Gehner, A. and Schmidt, J. and Kunze, D. and Wagner, M. and Lakner, H.}
}