@conference{aufsatz11013,
    affiliation = {Professur für Optoelektronische Bauelemente und Systeme},
    title = {Extended damping model for out-of-plane-comb driven micromirrors},
    journal = {Proceedings of SPIE},
    pages = {61140J-1--61140J-12},
    year = {2006},
    peerreview = {Nein},
    volume = {6114},
    doi = {www.spie.org/press},
    edition = {keiner},
    author = {Klose, T. and Sandner, T. and Schenk, H. and Lakner, H.}
}