@conference{aufsatz11020,
    affiliation = {Professur für Optoelektronische Bauelemente und Systeme},
    title = {Global flatness of spatial light modulators},
    journal = {Proceedings of SPIE},
    pages = {611404-1--611404-12},
    year = {2006},
    peerreview = {Nein},
    volume = {6114},
    doi = {www.spie.org/press},
    edition = {keiner},
    author = {Wagner, M. and Künzelmann, U. and Schenk, H. and Lakner, H.}
}