@conference{aufsatz11029,
    affiliation = {Professur für Optoelektronische Bauelemente und Systeme},
    title = {Scanning 2D micromirror with enhanced flatness at high frequency},
    journal = {Proceedings of SPIE},
    pages = {61140L-1--61140L-8},
    year = {2006},
    peerreview = {Nein},
    volume = {6114},
    doi = {www.spie.org/press},
    edition = {keiner},
    author = {Wolter, A. and Klose, T. and Hsu, S.-T. and Schenk, H. and Lakner, H.}
}