@article{aufsatz11310,
affiliation = {Professur für Halbleitertechnik},
title = {Thin tantalum-silicon-oxygen/tantalum-silicon-nitrogen films as high efficiency humidity diffusion barriers for solar cell encapsulation},
journal = {Thin Solid Films 515},
pages = {1612--1617},
year = {2006},
peerreview = {Nein},
edition = {keiner},
author = {Heuer, H. and Wenzel, C. and Herrmann, D. and Hübner, R. and Chang, Z.L. and Bartha, J.W.}
}