BibTex - Publikationen
@article{aufsatz11310,
    affiliation = {Professur für Halbleitertechnik},
    title = {Thin tantalum-silicon-oxygen/tantalum-silicon-nitrogen films as high efficiency humidity diffusion barriers for solar cell encapsulation},
    journal = {Thin Solid Films 515},
    pages = {1612--1617},
    year = {2006},
    peerreview = {Nein},
    edition = {keiner},
    author = {Heuer, H. and Wenzel, C. and Herrmann, D. and Hübner, R. and Chang, Z.L. and Bartha, J.W.}
}