@article{aufsatz11313,
affiliation = {Professur für Halbleitertechnik},
title = {Effect of nitrogen content on the degradation mechanisms of thin Ta-Si-N diffusion barriers for Cu metallization},
journal = {Thin Solid Films 500},
pages = {259--267},
year = {2006},
peerreview = {Nein},
volume = {500},
edition = {keiner},
author = {Hübner, R. and Hecker, M. and Mattern, N. and Hoffmann, V. and Wetzig, K. and Heuer, H. and Wenzel, C. and Engelmann, H.-J. and Gehre, D. and Zschech, E.}
}