@article{aufsatz11315,
    affiliation = {Professur für Halbleitertechnik},
    title = {Investigation of a Ta-Si-O/Ta-Si-N bilayer system for embedded SAW finger structures},
    journal = {Microelectronic Engineering 82},
    pages = {301--306},
    year = {2006},
    peerreview = {Nein},
    volume = {82},
    edition = {keiner},
    author = {Reitz, D. and Heuer, H. and Baunack, S. and Hübner, R. and Hoffmann, V. and Menzel, S. and Wenzel, C. and Wetzig, K.}
}