@conference{aufsatz20463,
    affiliation = {Professur für Halbleitertechnik},
    title = {ALD of Ta-based Adhesion Layers for CNT-Cu Matrix Composite Film Growth},
    journal = {Proc. MSR Spring Meet., San Francisco (US)},
    year = {2007},
    peerreview = {Nein},
    doi = {http://},
    author = {S., Menzel and C., Hossbach and J., Thomas and M., Albert and T., Gemming and M., Stangl and S., Hampel}
}