@conference{aufsatz20465,
    affiliation = {Professur für Halbleitertechnik},
    title = {Characterization of the initial growth of hafnium silicate films in dependence of process parameters and substrate materials},
    journal = {Proc. EMRS Fall-Meet., Warschau (PL)},
    year = {2007},
    peerreview = {Nein},
    doi = {http://},
    author = {S., Nawka and E., Erben and B., Adolphi and J.W., Bartha}
}