@conference{aufsatz20471,
    affiliation = {Professur für Halbleitertechnik},
    title = {Plasma-Enhanced Atomic Layer Deposition of High Quality Tantalum Carbonitride Thin Films},
    journal = {Proc. AVS ALD Conf., San Diego (US)},
    year = {2007},
    peerreview = {Nein},
    volume = {ohne Abdruck},
    doi = {http://},
    author = {Hossbach, C. and Albert, M. and Teichert, S. and Hintze, B. and Mühle, U. and Wilde, L. and Bartha, J.W.}
}