@conference{aufsatz20472,
    affiliation = {Professur für Halbleitertechnik},
    title = {Laser Plasma Deposition of thin ZnO films, doped by nitrogen},
    journal = {Int. Conf. Micro- & Nano-Electr., Zvenigorod (RU)},
    year = {2007},
    peerreview = {Nein},
    volume = {ohne Abdruck},
    doi = {http://},
    author = {Novodvorsky, O.A. and Kharmova, O.D. and Panchenko, V.Ya. and Gorbatenko, L.S. and Cherebilo, Ye.A. and Batishev, G.A. and Wenzel, C. and Bartha, J.W. and Bublik, V.T. and Hiemann , E.}
}