@conference{aufsatz20705,
    affiliation = {Professur für Halbleitertechnik},
    title = {In-Situ Metrology for improved Atomic Layer Deposited TaN Properties by Supplying Additional Energy},
    journal = {Agent. Proc. AVS ALD Conf., San Francisco (US)},
    year = {2006},
    peerreview = {Nein},
    volume = {avail, online},
    doi = {http://},
    author = {Schmidt, D. and Hossbach, C. and Albert, M. and Bartha, J.W. and Menzel, S.}
}