@article{aufsatz20706,
    affiliation = {Professur für Halbleitertechnik},
    title = {Top Injection Reactor Tool with in situ Spectroscopic Ellipsometry for growth and characterization of ALD thin films},
    journal = {Microelectronic Engineering},
    pages = {527--533},
    year = {2008},
    peerreview = {Nein},
    volume = {85},
    doi = {http://},
    author = {Schmidt, D. and Strehle, S. and Albert, M. and Hentsch, W. and Bartha, J.W.}
}