@conference{aufsatz20707,
    affiliation = {Professur für Halbleitertechnik},
    title = {Atomic Layer Deposition of Tantalum Nitride Based Thin Films},
    journal = {Agent. Proc. MAM Conf., Dresden (D)},
    year = {2008},
    peerreview = {Nein},
    volume = {avail, online},
    doi = {http://},
    author = {Schmidt, D. and Hossbach, C. and Menzel, S. and Thomas, J. and Teichert, S. and Hintze, B. and Wilde, L. and Albert, M. and Bartha, J.W.}
}