@conference{aufsatz20708,
    affiliation = {Professur für Halbleitertechnik},
    title = {TAPEDIS - a liquid halide ALD Precursor for depositing Ta-N bases thin films},
    journal = {Agent. Proc. AVS Conf. Bruges (B)},
    year = {2008},
    peerreview = {Nein},
    volume = {avail, online},
    doi = {http://},
    author = {Schmidt, D. and Knaut, M. and Albert, M. and Hintze, B. and Bartha, J.W.}
}