@article{aufsatz20710,
    affiliation = {Professur für Halbleitertechnik},
    title = {Positve etch profiles in silicon with improved pattern quality},
    journal = {Plasma Process. Polym.},
    year = {2007},
    peerreview = {Nein},
    volume = {4},
    doi = {http://},
    author = {Richter, K. and Zschätzsch, G. and Bartha, J.W.}
}