@conference{aufsatz20932,
affiliation = {Professur für Halbleitertechnik},
title = {Metal and Insulator layers for DRAM applications},
journal = {GerALD2008, Sept. 22-23, Halle},
year = {2008},
peerreview = {Ja},
doi = {http://},
author = {Albert, M. and Strehle, S. and Schmidt, D. and Knaut, M. and Hossbach, C. and Rößler, T. and Bartha, J.W. and Gluch, J. and Menzel, S. and Schröder, U. and Hintze, B.}
}