@conference{aufsatz20937,
    affiliation = {Professur für Halbleitertechnik},
    title = {High rate deposition of amorphous silicon thin film solar cells (120nm/min) with a VHF-PECVD inline deposition system},
    journal = {23rd European Photovoltaic Solar Energy Conference, 1.-5. Sept. 2008, Valencia, Spain},
    year = {2008},
    peerreview = {Nein},
    doi = {http://},
    author = {Albert, M. and Strobel, C. and Kuske, J. and Bartha, J.W.}
}