@conference{aufsatz20938,
    affiliation = {Professur für Halbleitertechnik},
    title = {Investigation on layer properties of amorphous and microcrystalline silicone deposited with moving substrates in combination with a VHF Linear Plasma Source designed for the fabrication of large area devices},
    journal = {22rd European Photovoltaic Solar Energy Conference, 3.-7. Sept. 2007, Mailand, Italy},
    keywords = {a-Si, Micro Crystalline Si, Deposition, Doping, Manufacturing and Processing, PECVD, Solar Cell Efficiencies, Polymer Film},
    year = {2007},
    peerreview = {Nein},
    doi = {http://},
    author = {Strobel, C. and Zimmermann, T. and Albert, M. and Bartha, J.W. and Beyer, W. and Kuske, J.}
}