@conference{aufsatz20939,
affiliation = {Professur für Halbleitertechnik},
title = {Characterization of ALD Hf-Y-O},
journal = {ALD conference, 2008, Brügge},
year = {2008},
peerreview = {Nein},
doi = {http://},
author = {Rößler, T. and Gluch, J. and Knaut, M. and Albert, M. and Schröder, U. and Teichert, S. and Bartha, J.W.}
}