@conference{aufsatz20942,
    affiliation = {Professur für Halbleitertechnik},
    title = {In situ XPS investigation about the growth of the first atomic layer of Ta(N) films deposited by thermal TBTDET ALD},
    journal = {Tagungsbandbeitrag und Poster auf dem MRS Fall Meeting 2008, Boston, MA USA},
    year = {2008},
    peerreview = {Nein},
    doi = {http://},
    author = {Strehle, S. and Schmidt, D. and Gutsch, S. and Knaut, M. and Albert, M. and Bartha, J.W.}
}