@conference{aufsatz20945,
    affiliation = {Professur für Halbleitertechnik},
    title = {A novel infrared method for measuring material removal through the silicon wafer},
    journal = {CMP-Nutzertreffen, Itzehoe, 11.04.2008},
    year = {2008},
    peerreview = {Ja},
    doi = {http://},
    author = {Schumacher, H. and Estel, K. and Künzelmann, U. and Bartha, J.W.}
}