@conference{aufsatz20949,
    affiliation = {Professur für Halbleitertechnik},
    title = {Chemical and physical surface interactions during the oxide CMP studied through the wafer backside by FTIR spectroscopy},
    journal = {Electrochemistry: Crossing Boundaries, Gießen, 6.10.2008},
    year = {2008},
    peerreview = {Ja},
    doi = {http://},
    author = {Künzelmann, U. and Schumacher, H. and Estel, K. and Vasilev, B. and Bartha, J.W.}
}