@conference{aufsatz21262,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Laser drilled through silicon vias: Crystal defect analysis by Synchrotron X-ray topography},
    journal = {ESTC 2008, Greenwich, UK},
    year = {2008},
    peerreview = {Nein},
    doi = {http://www.estc.biz/fileadmin/docdownload/ESTC_programme_final.pdf},
    author = {Landgraf, R. and Rieske, R. and Danilewsky, A.N. and Wolter , K.-J.}
}