@conference{aufsatz21442,
    affiliation = {Professur für Optoelektronische Bauelemente und Systeme},
    title = {Silicon based micro-optic modulators},
    journal = {MME 2008, 19th Micro Mechanics Europe Workshop, Technical Digest},
    location = {Aachen},
    year = {2008},
    peerreview = {Ja},
    doi = {http://},
    author = {Schenk, H. and Wagner, M. and Gehner, A. and Müller, M. and Sandner, T. and Drabe, C. and Lakner, H.}
}