@conference{aufsatz21443,
    affiliation = {Professur für Optoelektronische Bauelemente und Systeme},
    title = {Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates },
    journal = {Proc. SPIE},
    pages = {69930D-01--69930D-08},
    year = {2008},
    peerreview = {Ja},
    volume = {6993},
    doi = {http://},
    author = {Schmidt, J.-U. and Friedrichs, M. and Bakke, T. and Voelker, B. and Rudloff, D. and Lakner, H.}
}