@conference{aufsatz21665,
    affiliation = {Professur für Halbleitertechnik},
    title = {Plasma-Enhanced Atomic Layer Deposition of High Quality Tantalum Carbonitride Thin Films},
    journal = {MAM-Conference 2008, 3.3.2008, Dresden},
    year = {2008},
    peerreview = {Ja},
    doi = {http://},
    author = {Hoßbach, C. and Menzel, S. and Thomas, J. and Teichert, S. and Hintze, B. and Wilde, L. and Schmidt, D. and Albert, M. and Bartha, J.W.}
}