@conference{aufsatz23680,
    affiliation = {Professur für Halbleitertechnik},
    title = {Through Silicon Contacts for IC and Sensoric Application},
    journal = {Semiconductor Conference Dresden, 23.-24.04.08},
    year = {2008},
    peerreview = {Ja},
    volume = {CD},
    doi = {http://},
    author = {Viehweger, K. and Richter, K. and Künzelmann, U. and Wojcik, H. and Merkel, U. and Hiess, A. and Jahn, A. and Wenzel, C. and Bartha, J.W.}
}