BibTex - Publikationen
@conference{aufsatz23744,
    affiliation = {Professur für Halbleitertechnik},
    title = {Detailed characterization of HSQ for e-beam application in DRAM pilot line environment},
    journal = {EIPBN, Portland, Oregon, USA},
    year = {2008},
    peerreview = {Ja},
    doi = {http://},
    author = {Keil, K. and Choi, K.-H. and Hohle, C. and Kretz, J. and Szikszai, L. and Bartha, J.W.}
}