@conference{aufsatz23744,
affiliation = {Professur für Halbleitertechnik},
title = {Detailed characterization of HSQ for e-beam application in DRAM pilot line environment},
journal = {EIPBN, Portland, Oregon, USA},
year = {2008},
peerreview = {Ja},
doi = {http://},
author = {Keil, K. and Choi, K.-H. and Hohle, C. and Kretz, J. and Szikszai, L. and Bartha, J.W.}
}