@article{aufsatz23752,
    affiliation = {Professur für Halbleitertechnik},
    title = {Investigation of the relaxation behavior of Si1-xCx alloys during epitaxal UHV-CVD growth},
    journal = {Materials Science and Engineering B 154-155},
    pages = {90--94},
    year = {2008},
    peerreview = {Nein},
    doi = {http://},
    author = {Ostermay, I. and Kammler, T. and Naumann, A. and Bartha, J.W. and Kuecher, P.}
}