@article{aufsatz26182,
    affiliation = {Professur für Halbleitertechnik},
    title = {Productivity potential of an inline deposition system for amorphous and microcrysalline silicon solar cells},
    journal = {Solar Energy Materials and Solar Cells},
    keywords = {Amorphous, Silicon, Microcrystalline, Large area, VHF-PECVD, Solar cells},
    pages = {1598--1607},
    year = {2009},
    peerreview = {Ja},
    doi = {http://elsevier.com/locate/solmat},
    author = {Strobel, C. and Zimmermann, T. and Albert, M. and Bartha, J.W. and Kuske, J.}
}