@article{aufsatz26496,
    affiliation = {Professur für Halbleitertechnik},
    title = {Detailed characterization of hydrogen silsesquixane for e-beam applications in a dynamic random access memory pilot line environment},
    journal = {J. Vac. Sci. Technol.},
    keywords = {hydrogen silsesquioxane},
    pages = {1071--1023},
    year = {2009},
    peerreview = {Ja},
    volume = {B 27(1)},
    author = {Keil, K. and Choi, K.-H. and Hohle, C. and Kretz, J. and Szikszai, L. and Bartha, J.W.}
}