BibTex - Publikationen
@article{aufsatz26499,
    affiliation = {Professur für Halbleitertechnik},
    title = {Electromigration in electroplated Cu(Ag) alloy thin films investigated by means of single damascene Blech structures},
    journal = {Microelectronic Engineering},
    keywords = {Single damascene technology, Electromigration drift experiments, Blech structures, Copper-silver alloys},
    year = {2009},
    peerreview = {Ja},
    volume = {in press},
    doi = {10.1016/j.mee.2009.04.028},
    author = {Strehle, S. and Menzel, S. and Jahn, A. and Merkel, U. and Bartha, J.W. and Wetzig, K.}
}