@article{aufsatz26500,
    affiliation = {Professur für Halbleitertechnik},
    title = {Enhancing epitaxial SixC1_x deposition by adding Ge},
    journal = {Thin Solid Films},
    keywords = {Strained silicon, Epitaxy, Ultral-highvacuum chemical vapor deposition, Complementary metal oxide semiconductor},
    pages = {2834--2838},
    year = {2010},
    peerreview = {Ja},
    volume = {518},
    doi = {10.1016/j.tsf.2009.08.045},
    author = {Ostermay, I. and Kammler, T. and Bartha, J.W. and Kücher, P.}
}