@article{aufsatz26501,
affiliation = {Professur für Halbleitertechnik},
title = {Fast backscattering parameter determination in e-beam lithography with a modified doughnut test},
journal = {Microelectronic Engineering},
keywords = {E-beam, Backscattering, Proximity effect correction, Doughnut test},
year = {2009},
peerreview = {Ja},
volume = {in press},
author = {Keil, K. and Hauptmann, M. and Choi, K.-H. and Kretz, J. and Eng, L.M. and Bartha, J.W.}
}