BibTex - Publikationen
@article{aufsatz26501,
    affiliation = {Professur für Halbleitertechnik},
    title = {Fast backscattering parameter determination in e-beam lithography with a modified doughnut test},
    journal = {Microelectronic Engineering},
    keywords = {E-beam, Backscattering, Proximity effect correction, Doughnut test},
    year = {2009},
    peerreview = {Ja},
    volume = {in press},
    author = {Keil, K. and Hauptmann, M. and Choi, K.-H. and Kretz, J. and Eng, L.M. and Bartha, J.W.}
}