@article{aufsatz26503,
    affiliation = {Professur für Halbleitertechnik},
    title = {Method to determine the sticking coefficient of precursor molecules in atomic layer depostion},
    journal = {Applied Surface Science},
    keywords = {Atomic layer depostion, Sticking coefficient, Deep trench, Simulation, Free molecular flow, Surface chemistry},
    pages = {6620--6623},
    issn = {0169-4332},
    year = {2009},
    peerreview = {Ja},
    volume = {255},
    doi = {10.1016/j.apsusc.2009.02.055},
    author = {Rose, M. and Bartha, J.W.}
}