@article{aufsatz26503,
affiliation = {Professur für Halbleitertechnik},
title = {Method to determine the sticking coefficient of precursor molecules in atomic layer depostion},
journal = {Applied Surface Science},
keywords = {Atomic layer depostion, Sticking coefficient, Deep trench, Simulation, Free molecular flow, Surface chemistry},
pages = {6620--6623},
issn = {0169-4332},
year = {2009},
peerreview = {Ja},
volume = {255},
doi = {10.1016/j.apsusc.2009.02.055},
author = {Rose, M. and Bartha, J.W.}
}