@conference{aufsatz27186,
    affiliation = {Professur für Halbleitertechnik},
    title = {Investigation of Surface Processes by ATR-FTIR Spectroscopy at Microstructured Silicon Wafers},
    journal = {23rd CMP User Meeting, 09.10.2009},
    keywords = {ATR-FTIR Spectroscopy, Microstructured Silicon Wafers},
    year = {2009},
    peerreview = {Ja},
    author = {Künzelmann, U. and Schumacher, H. and Bartha, J.W.}
}