@conference{aufsatz27280,
    affiliation = {Professur für Optoelektronische Bauelemente und Systeme},
    title = {Fabrication of 3D comb-drive microscanners by mechanically induced permanent displacement},
    journal = {Proc. of SPIE},
    keywords = {3D- Microscanner},
    pages = { 72080A-1-- 72080A-11},
    year = {2009},
    peerreview = {Ja},
    volume = {vol. 7208},
    institution = {SPIE},
    author = {Jung, D. and Kallweit, D. and Sandner, T. and Conrad, H. and Schenk, H. and Lakner, H.}
}