@article{aufsatz27942,
    affiliation = {Professur für Optoelektronische Bauelemente und Systeme},
    title = {Single crystal silicon micro mirrors },
    journal = {Physica Status Solidi C 6},
    keywords = {micro mirrors},
    pages = {728--735},
    year = {2009},
    peerreview = {Ja},
    number = {3},
    author = {Schenk, H. and Sandner, T. and Drabe, C. and Klose, T. and Conrad, H.}
}