@article{aufsatz27943,
    affiliation = {Professur für Optoelektronische Bauelemente und Systeme},
    title = {Integrated position sensing for 2D micro scanning mirrors using the SOI-Device layer as the piezoresistive mechanical-elastic transformer},
    journal = {SPIE Proc. of Photonics West},
    keywords = {2D micro scanning mirror},
    pages = {720808-1--720808-10},
    year = {2009},
    peerreview = {Ja},
    volume = {vol. 7208},
    author = {Grahmann, J. and Conrad, H. and Sandner, T. and Klose, T. and Schenk, H.}
}