@conference{aufsatz28756,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Adhesive porous DLC-coatings by modified PECVD process},
    journal = {Proc. E-MRS Spring-Meeting, Strasbourg, 8.-12. Juni 2009},
    keywords = {DLC-coatings, PECVD process},
    year = {2009},
    peerreview = {Nein},
    author = {Schütz, A. and Henning, S. and Heeg, J. and Adolphi, B. and Schwarz, C. and Litschke, H. and Wienecke, M.}
}