@conference{aufsatz28836,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Novel Method for Crystal Defect Analysis of Laser Drilled TSVs},
    journal = {Proc. of the 59th Electronic Components and Technology Conference 2009, San Diego, USA, 26.-29.05.2009},
    keywords = {Crystal Defect Analysis},
    pages = {1139--1146},
    year = {2009},
    peerreview = {Nein},
    author = {Rieske, R. and Landgraf, R. and Wolter, K.-J.}
}