@article{aufsatz29571,
    affiliation = {Professur für Halbleitertechnik},
    title = {Inline deposition of microcrystalline silicon solar cells using a linear plasma source},
    journal = {Phys. Status Solidi C 7},
    keywords = {microcrystalline silicon solar cells},
    pages = {1097--1100},
    publisher = {WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim},
    year = {2010},
    peerreview = {Ja},
    number = {3-4},
    doi = {10.1002/pssc.200982684},
    author = {Zimmermann, T. and Strobel, C. and Albert, M. and Beyer, W. and Gordijn, A. and Flikweert, A.J. and Kuske, J. and Bartha, J.W.}
}