@conference{aufsatz32231,
    affiliation = {Professur für Halbleitertechnik},
    title = {Dynamic VHF-PECVD concept tool with linear plasma sources for silicon based thin film solar cells},
    journal = {Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, 2010},
    keywords = {-},
    year = {2010},
    peerreview = {Ja},
    author = {Strobel, C. and Leszczynska, B. and Zimmermann, T. and Albert, M. and Bartha, J.W. and Kuske, J.}
}