@article{aufsatz32232,
    affiliation = {Professur für Halbleitertechnik},
    title = {Investigation of Moisture Uptake in Low-k Dielectric Materials},
    journal = {IEEE Transaction on Electron Devices},
    keywords = {-},
    pages = {1865--1872},
    year = {2010},
    peerreview = {Ja},
    volume = {57},
    number = {8},
    author = {Kubasch, C. and Klaus, C. and Ruelke, H. and Mayer, U. and Bartha, J.W.}
}