@conference{aufsatz32233,
    affiliation = {Professur für Halbleitertechnik},
    title = {In-situ XPS study on the growth of ultra-thin Al-O and Ti-O based films with atomic layer deposition},
    journal = {E-MRS 2010 Spring Meeting in Strasbourg, 07.06.2010-11.06.2010},
    keywords = {ALD},
    year = {2010},
    peerreview = {Nein},
    volume = {Poster},
    author = {Geidel, M. and Knaut, M. and Albert, M. and Bartha, J.W.}
}