@conference{aufsatz32236,
    affiliation = {Professur für Halbleitertechnik},
    title = {In situ-ATR-FTIR-Untersuchungen zur Wirkungsweise von Additiven in TSV-Cu-Elektrolyten},
    journal = {Industriepartnersymposium, Dresden, 30. Sept. 2010},
    keywords = {-},
    year = {2010},
    peerreview = {Nein},
    volume = {Poster},
    author = {Künzelmann, U. and Schumacher, H. and Bartha, J.W.}
}