@conference{aufsatz32238,
    affiliation = {Professur für Halbleitertechnik},
    title = {Characterisation of Surface Processes during Oxide CMP by in situ FTIR Spectroscopy with Microstructured Reflection Elements at Silicon Wafers},
    journal = {Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics, MRS Spring Meeting 2010, San Francisco, CA, 5. - 7. April 2010},
    keywords = {-},
    pages = {135--140},
    year = {2010},
    peerreview = {Ja},
    volume = {Materials Research Society - Symposium Proceedings, 1249},
    author = {Schumacher, H. and Künzelmann, U. and Bartha, J.W.}
}