@conference{aufsatz32241,
    affiliation = {Professur für Halbleitertechnik},
    title = {Assessment Of Mechanical Properties Of Nanoscale Structures For Microprocessor Manufacturing },
    journal = {11th International Workshop on Stress-Induced Phenomena in Metallization April 12 - 14, 2010, Dresden},
    keywords = {Nanoscale Structures},
    year = {2010},
    peerreview = {Nein},
    volume = {Poster},
    author = {Niese, S. and Hecker, M. and Liske, R. and Ritz, Y. and Zschech, E. and Wojcik, H. and Bartha, J.W. and Wud, Z. and Hod, P.S.}
}